@ARTICLE{Marszałek_Konstanty_Computer_2014, author={Marszałek, Konstanty and Stępień, Jacek and Mania, Ryszard}, volume={vol. 60}, number={No 4}, journal={International Journal of Electronics and Telecommunications}, howpublished={online}, year={2014}, publisher={Polish Academy of Sciences Committee of Electronics and Telecommunications}, title={Computer Controlled System for the Magnetron Sputtering Deposition of the Metallic Multilayers}, URL={http://so.czasopisma.pan.pl/Content/87676/PDF/eletel-2014-0038.pdf}, doi={10.2478/eletel-2014-0038}, }